The LSM 900 Confocal Laser Scanning Microscope and TEMDS 500 High Vacuum Electron Beam Vapor Station are ready for operation

The LSM 900 Confocal Laser Scanning Microscope and TEMDS 500 High Vacuum Electron Beam Vapor Station have been installed and ready for operation. Appointments are welcome.


LSM 900 Confocal Laser Scanning Microscope

Key specifications:

Lateral resolution: 120 nm

Axial resolution: 10 nm

Maximum sampling frequency : 6144x6144

Light source: Xenon, halogen, LED, 405nm, 488nm, 561nm, 640nm solid-state lasers

Objectives: 5X, 10X, 20X, 40X, 50X

Key features:

Allows accurate 3D imaging of materials and morphological analysis, as well as specific fluorescence characterization and imaging.

Observation modes: reflected light field, dark field, multicolor fluorescence and transmitted light field, etc.

Contact:

B212, School of materials science and engineering, Tsinghua University, 010-62787647, Eng. Liu


High Vacuum Electron Beam Vapor Station

Key specifications.

Substrate stage size: 120 mm x 120 mm (with water cooling)

Substrate stage baking temperature: RT ~ 300°C

Equipped with 10kW electron gun, 6 cavity crucible; two 1500 W metal evaporation sources.

Key features:

Evaporation of low melting point metals, refractory metals, non-metallic oxides and alloys, for the preparation of optoelectronic thin films, ferroelectric films, etc.; with double probe film thickness meter.

Contact:

B120, School of materials science and engineering, Tsinghua University, 010-62782254, Eng. Liang